Suzhou Unite Precision Technology Co., Ltd.
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Short Stroke High response Closed-Loop Servo XYZ Linear Module Motion Stage For CNC Machine
The cylindrical design of the VCM (voice coil motor) utilizes a tubular structure which houses its basic components. It consists of a coil and a permanent magnet, both aligned along the motor's center axis. The coil is usually wound around a hollow cylinder, while the permanent magnet surrounds the coil. In semiconductor applications, the accuracy and responsiveness of the VCM cylindrical voice coil motor is critical to achieving the stringent requirements of the semiconductor manufacturing process. It allows precise manipulation of the wafer, ensuring consistent and high quality production of semiconductor devices.
Manipulation in semiconductor applications:
Wafer Handling: During semiconductor manufacturing, wafers need to be precisely positioned for a variety of processes. the VCM cylindrical motor is integrated into the wafer handling system to enable precise alignment.
Alignment: When a wafer needs to be positioned for a specific process, the control system sends a signal to the VCM. Current flows through a coil, creating a magnetic field. The interaction between this magnetic field and the permanent magnets creates a force that moves the coil and the attached load (wafer) to the desired position.
Feedback Control: To ensure accuracy, the motion of the VCM is monitored by a feedback system. Sensors measure the position of the motor and provide this information to the control system. If any deviation from the target position is detected, the control system adjusts the current flowing through the coil to correct the position.
High Accuracy: The VCM cylindrical motor utilizes a direct drive mechanism, resulting in high accuracy. Since there are no gears or belts, backlash and mechanical clearance are minimized, resulting in precise positioning.
| Product Modle | Peak Force | Continious Force | Total Stroke | Peak current | Peak Voltage | Thrust constant | Encoder resolution | Repeat precision |
| VCAR0006-0050-00A | 6.2 | 2.6 | 5 | 1.7 | 15.7 | 3.57 | 0.1/0.5/1 | 1/5/10 |
| VCAR0013-0072-00A | 13 | 4.2 | 7.2 | 2.3 | 26.6 | 5.72 | 0.1/0.5/1 | 1/5/10 |
| VCAR0022-0098-00A | 22 | 6.5 | 9.8 | 3.8 | 24.7 | 5.8 | 0.1/0.5/1 | 1/5/10 |
| VCAR0033-0099-00A | 33 | 8 | 9.9 | 4.5 | 24.3 | 5.87 | 0.1/0.5/1 | 1/5/10 |
| VCAR0044-0249-00A | 44 | 11.7 | 24.9 | 4.95 | 44.9 | 8.88 | 0.1/0.5/1 | 1/5/10 |
| VCAR0070-0149-00A | 70 | 27.3 | 14.9 | 4 | 26.9 | 17.7 | 0.1/0.5/1 | 1/5/10 |
| VCAR0087-0062-00A | 87 | 21.67 | 6.2 | 6.85 | 34.5 | 12.7 | 0.1/0.5/1 | 1/5/10 |
| VCAR0262-0112-00A | 262 | 111 | 11.2 | 6.4 | 35.1 | 41 | 0.1/0.5/1 | 1/5/10 |
| VCAR0262-0249-00A | 262 | 112 | 24.9 | 10.1 | 28.2 | 26 | 0.1/0.5/1 | 1/5/10 |
| VCAR0436-0250-00A | 436 | 167 | 25 | 11.7 | 31.6 | 37.2 | 0.1/0.5/1 | 1/5/10 |
| VCAR1351-0310-00A | 1351 | 376.8 | 3 | 19.9 | 73.5 | 68 | 0.1/0.5/1 | 1/5/10 |
Voice coil motor single-axis module for short-stroke closed-loop servo applications with light actuator weight and fast response (up to 20G in milliseconds). The base adopts aviation aluminum precision machining, good stability, can do high-speed oscillating and reciprocating movement. Simple and reliable control, no reversing device required, maintenance-free long life. Precision position, speed, acceleration and thrust control is possible. Equipped with suitable encoder and guide rail, position accuracy can reach 0.1-5um. According to the different motion, the thrust requirements are configured with appropriate drivers and controllers. The platform structure can be processed and customized. According to different applications, suitable linear guiding mechanism is configured: different types of high-precision linear guide rails.
Technical indicators & specifications can be customized
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